TY  - BOOK
AU  - 
AU  - Stepanova, Maria, Ed.
TI  - Nanofabrication: techniques and principles
SN  - 9783709104231
U1  - 620.5 
PY  - 2012///
CY  - Wein
PB  - Springer
KW  - Nanotechnology
KW  - Biosensors
KW  - Nanostructures
ER  -