621.381  / Sch64i <br/>
Schomburg, Werner Karl <br/>
       Introduction to microsystem design 
 / Werner Karl Schomburg 
 .- Berlin: Springer-Verlag,  2011 
 .- xxi, 319p . 
.- ( Rwth Aachen University     
<br><u>ISBN:</u> 9783642194887 
<br/><u>Subject Headings:</u> <br/>Microeletromechanical systems;
<br><U>Copy Details:</u><br> Acc. No.: <b>A174257</b>, Full Call No.: 621.381 Sch64i,   Item type:  Books , Location: COMPACT STORAGE (BASEMENT), <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>