TY - BOOK AU - AU - Kaul, Anupama B., Ed. TI - Microelectronics to nanoelectronics: materials, devices and manufacturability SN - 9781466509542 U1 - 621.3815 PY - 2013/// CY - Boca Raton PB - Crc Press KW - Nanotechnology KW - Microelctronics KW - Nanoelctronics ER -