TY  - BOOK
AU  - 
AU  - Seshan, Krishna, Ed.
TI  - Handbook of thin film deposition: techniques, processes and technologies
SN  - 9781437778731
U1  - 621.38152 
PY  - 2012///
CY  - Amsterdam
PB  - Elsevier
KW  - Thin film devices--Design and construction
KW  - Thin films
ER  -