TY  - BOOK
AU  - 
AU  - Claverie, Alain, Ed.
TI  - Transmission electron microscopy in micro-nanoelectronics
SN  - 9781848213678
U1  - 621.381 
PY  - 2013///
CY  - London
PB  - Iste
KW  - Microelectronics
KW  - Nanotechnology
ER  -