TY - BOOK AU - Ananthasuresh, G. K. AU - Vinoy, K. J. AU - Gopalakrishnan, S. AU - Bhat, K. N. AU - Aatre, V. K. TI - Micro and smart systems: technology and modeling SN - 9780470919392 U1 - 621.381 PY - 2012/// CY - New Jersey PB - John Wiley & Sons KW - Intelligent control systems -- Design and construction KW - Microelectromechanical systems -- Design and construction ER -