TY  - BOOK
AU  - 
AU  - Huff, H. R., Ed.
TI  - High dielectric constant materials: VLSI MOSFET applications
SN  - 9783540210818
U1  - 621.3815 
PY  - 2005///
CY  - New York
PB  - Springer
KW  - Dielectrics
KW  - Integrated circuits -- Very large scale integration -- Materials
KW  - Semiconductors -- Materials
ER  -