TY  - BOOK
AU  - 
AU  - Utke, Ivo, Ed.
TI  - Nanofabrication using focused ion and electron beams: principles and applications
SN  - 9780199734214
U1  - 620.115 
PY  - 2012///
CY  - New York
PB  - Oxford University Press
KW  - Nanostructured materials
KW  - Nanotechnology
KW  - Electron beams -- Industrial applications
ER  -