TY  - BOOK
AU  - Colinge, Jean-Pierre
TI  - Silicon on insulator: material to VLSI
SN  - 079238007X
U1  - 621.38152 
PY  - 1997///
CY  - London
PB  - Springer
KW  - Semiconductors
KW  - Silicon-on-insulator technology
KW  - Integrated circuits -- Very large scale integration -- Materials
ER  -