TY  - BOOK
AU  - Sarkar, Jaydeep
TI  - Sputtering materials for VLSI and thin film devices
SN  - 9780815515937
U1  - 621.381 
PY  - 2014///
CY  - Amsterdam
PB  - Elsevier
KW  - Microelectronics -- Materials
KW  - Flat panel displays -- Materials
KW  - Sputtering (Physics)
ER  -