TY  - BOOK
AU  - 
AU  - Dabrowski, J., Ed.
TI  - Predictive simulation of semiconductor processing: status and challenges
SN  - 9783540204817
U1  - 621.3 
PY  - 2004///
CY  - Berlin
PB  - Springer
KW  - Transistor
KW  - Atomare Bewegung
KW  - Computersimulation
ER  -