TY  - BOOK
AU  - 
AU  - Tabata, Osamu, Ed.
AU  - Toshiyuki, Tsuchiya, Ed.
TI  - Reliability of MEMS: testing of materials and devices
SN  - 9783527335015
U1  - 621.381 
PY  - 2013///
CY  - Germany
PB  - Wiley-Vch
KW  - Microelectromechanical systems -- Reliability
KW  - MEMS
ER  -