TY  - BOOK
AU  - 
AU  - Jones, Anthony C., Ed
AU  - Michael L. Hitchman, Ed.
TI  - Chemical vapour deposition: precursors, processes and applications
SN  - 9780854044658
U1  - 671.735 
PY  - 2009///
CY  - Cambridge
PB  - Royal Society Of Chemistry
KW  - Chemical vapor deposition
ER  -