TY  - BOOK
AU  - Bhattacharyya, Bijoy
TI  - Electrochemical micromachining for nanofabrication, MEMS and nanotechnology
SN  - 978032332734
U1  - 620.5 
PY  - 2015///
CY  - Amsterdam
PB  - Elsevier
KW  - Nanotechnology
ER  -