TY  - BOOK
AU  - 
AU  - Tiwari, Atul [Ed.]
AU  - Raj, Baldev [Ed.]
TI  - Materials and failures in MEMS and NEMS
SN  - 9781119083603
U1  - 621.381 
PY  - 2015///
CY  - Massachusetts
PB  - Scrivener Publishing
KW  - Microelectromechanical systems -- Design and construction
KW  - Nanoelectrmechanical systems -- Design and construction
ER  -