TY  - BOOK
ED  - Symposium on the deposition of thin films by sputtering
TI  - Deposition of thin films by sputtering
U1  - 669.0284 
PY  - 1967///
CY  - New York
PB  - Rochester
KW  - Sputtering (Physics) -- Congresses
KW  - Ion Bombardment -- Congresses
ER  -