TY  - GEN
AU  - Maissel, Leon I. ,Ed.
AU  - Glang, Reinhard ,Ed.
AU  - 
TI  - Handbook of thin film technology
U1  - 621.3817 
PY  - 1970///
CY  - New York
PB  - Mcgraw-Hill
KW  - Thin Film Technology
ER  -