TY  - GEN
AU  - Sumino, K.
AU  - 
TI  - DEFECT CONTROL IN SEMICONDUCTORS
SN  - 0444884297
U1  - 621.38152 
PY  - 1990///
CY  - Amsterdam
PB  - North-Holland
KW  - Semiconductors -- Defects -- Cong
ER  -