TY  - GEN
AU  - Huff,H R, Tsuya,H
AU  - 
AU  - Gosele,U
AU  - 
AU  - H R Huff,H No Tsuya,U No Gosele
AU  - 
TI  - SILICON MATERIALS SCIENCE AND TECHNOLOGY
SN  - 1566771935(SET)
U1  - 621.38152 
PY  - 1998///
CY  - 
PB  - Electrochemical Society, Pennington,Nj
KW  - Semiconductors -- Congresses
KW  - Silicon Crystals -- Congresses
N1  - "Cover Title : Semiconductor Silicon 1998"
ER  -