TY  - GEN
AU  - R. A. Adey,A. Lahrmann,C. Lebmolann
AU  - Adey,R. A.,Lahrmann,A.
AU  - 
AU  - Lebmolann,C.
AU  - 
TI  - SIMULATION AND DESIGN OF MICROSYSTEMS AND MICROSTRUCTURES
SN  - 1853123900
U1  - 621.381 
PY  - 1995///
CY  - 
PB  - Computational Mechanics Pub., Southampton
KW  - Microelectronics -- Design -- Congresses
KW  - Microelectronics -- Simulation Methods -- Congresses
KW  - Micromechanics -- Congresses
ER  -