TY  - GEN
AU  - V. Raineri,No
AU  - Raineri,V.
AU  - 
TI  - GETTERING AND DEFECT ENGINEERING IN SEMICONDUCTOR TECHNOLOGY: GADEST 2001
SN  - 3908450640
U1  - 621.38152 
PY  - 2002///
CY  - 
PB  - Scitec Publications, Zuerich
KW  - Semiconductors -- Defects -- Congresses
KW  - Getters -- Congresses
KW  - Silicon Crystals -- Defects -- Congresses
ER  -