TY  - GEN
AU  - Varadan,Vijay K
AU  - 
AU  - Kish,Laszlo B
AU  - 
AU  - Vijay K Varadan,Laszlo B Kish
AU  - 
TI  - SMART ELECTRONICS, MEMS, BIOMEMS, AND NANOTECHNOLOGY
SN  - 0819448605
U1  - 621.381 
PY  - 2003///
CY  - 
PB  - Spie-The International Soc. For Optical Engg., Washington
KW  - Microelectronics -- Materials -- Congresses
KW  - Smart Materials -- Congresses
KW  - Actrators -- Congresses
ER  -