TY  - GEN
AU  - Chiao,Jung-Chih,Varadan,Vijay K
AU  - 
AU  - Cane,Carles
AU  - 
AU  - Jung-Chih Chiao,Vijay K Varadan,Carles Cane
AU  - 
TI  - SMART SENSORS, ACTUATORS, AND MEMS
SN  - 0819449768
U1  - 621.381 
PY  - 2003///
CY  - 
PB  - Spie-The International Soc. For Optical Engg., Washington
KW  - Microelectrochemical Systems -- Congresses
KW  - Microtechnology -- Congresses
ER  -