TY  - GEN
AU  - Richter,H.
AU  - 
AU  - Kittler,M.
AU  - 
TI  - GETTERING AND DEFECT ENGINEERING IN SEMICONDUCTOR TECHNOLOGY, GADEST 2003
SN  - 3908450829
U1  - 621.38152 
PY  - 2004///
CY  - 
PB  - Scitec Publications Ltd., Switzerland
KW  - Semiconductors -- Congresses
KW  - Getters -- Congresses
KW  - Silicon Crystals -- Defects -- Congresses
ER  -