TY  - GEN
AU  - Varadan,Vijay K.
AU  - 
TI  - SMART ELECTRONICS, MEMS, BIOMEMS, AND NANOTECHNOLOGY V.5389
SN  - 0819453064
U1  - 621.381 
PY  - 2004///
CY  - 
PB  - Spie-The International Soc. For Optical Engg., Washington
KW  - Microelectronics -- Materials -- Congresses
KW  - Smart Materials -- Congresses
KW  - Actrators -- Congresses
ER  -