TY  - GEN
AU  - Teo, Selin, Ed.
AU  - 
ED  - International Conference on Materials for Advanced Technologies
TI  - NEMS/MEMS technology and devices
SN  - 9780878493210
U1  - 620.5 
PY  - 2009///
CY  - Switzerland
PB  - Trans Tech Publictions Ltd.
KW  - Nems
ER  -