TY  - GEN
AU  - Gatzen, Hans H.
AU  - Saile, Volker
AU  - Leuthold, Jürg
TI  - Micro and Nano Fabrication [perpetual]: tools and processes
SN  - 9783662443958
U1  - 620.5 
PY  - 2015///
CY  - New York
PB  - Springer
KW  - Microelectromechanical systems
KW  - Microfabrication
N2  - For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control
UR  - https://link.springer.com/book/10.1007/978-3-662-44395-8
ER  -