TY  - GEN
AU  - Ohring, Milton
TI  - Materials science of thin films [2nd ed.] [Perpetual access]: deposition and structure 
SN  - 9780125249751
U1  - 621.38152 
PY  - 1991///
CY  - New York
PB  - Elsevier
KW  - Thin films
UR  - https://www.sciencedirect.com/book/9780125249751/materials-science-of-thin-films
ER  -