TY  - BOOK
AU  - Plummer, James D.
AU  - Deal, Michael D.
TI  - Silicon VLSI technology: fundamentals, practice and modeling
SN  - 9788131726044
U1  - 621.395 
PY  - 2009///
CY  - Noida
PB  - Pearson
KW  - Integrated circuits
KW  - Very large scale integration
N2  -  Silicon VLSI Technology - Fundamentals, Practice And Modeling is a reference book that provides detailed information on the field of silicon technology, with a focus on the concept of modern computer simulation. It not only delves into the manufacturing of silicon chips, but also looks at the underlying scientific technologies involved in the process. It also provides the background on the invention of the silicon chip and its development over the years. The book presents several methods and examples of modern computer simulation. Some of the concepts covered in the book are CMOS technology, lithography, wafer fabrication, dopant diffusion, thin-film deposition, and etching. The book was published in 2009 by Pearson
ER  -