| 000 | 00513pam a2200193a 44500 | ||
|---|---|---|---|
| 008 | 160408b1976 xxu||||| |||| 00| 0 eng d | ||
| 082 |
_a621.38152 _bG245i |
||
| 100 | _aCarter, G. | ||
| 245 | 1 | _aION IMPLANTATION OF SEMICONDUCTORS | |
| 260 |
_aLondon _bEdward Arnold _c1976 |
||
| 300 | _a214 | ||
| 440 |
_aContemporary Electrical Engineering _v |
||
| 500 | _aBibliographical References | ||
| 650 | _aIons | ||
| 650 | _aSemiconductors | ||
| 700 | _aGrant, W. A. | ||
| 964 | _gCIRC | ||
| 997 | _aA49551 s C | ||
| 999 |
_c239399 _d239399 |
||