000 00690pam a2200217a 44500
008 160408b1967- xxu||||| |||| 00| 0 eng d
082 _a621.3817
_bB911f
100 _aBurger, Robert M.
245 1 _aFUNDAMENTALS OF SILICON INTEGRATED DEVICE TECHNOLOGY
260 _aEnglewood Cliffs, N. J.
_bPrentice-Hall
_c1967-
300 _av.
440 _aSolid State Physical Electronics Series
_v
500 _aContents : V. 1. Oxidation, Diffusion And Epitaxy
500 _aIncludes Bibliographies
500 _aPrentice-Hall Electrical Engineering Series
650 _aMicroelectronics
650 _aSilicon
700 _aDonovan, R. P.
964 _gCIRC
997 _aA4797 v. 2 C
999 _c247042
_d247042