| 000 | 00606pam a2200193a 44500 | ||
|---|---|---|---|
| 008 | 160408b1971 xxu||||| |||| 00| 0 eng d | ||
| 082 |
_a621.381 _bH191 |
||
| 100 | _aMilek, John T. | ||
| 245 | 1 | _aSILICON NITRIDE FOR MICROELECTRONIC APPLICATIONS | |
| 260 |
_aNew York _bIfi/Plenum _c1971 |
||
| 300 | _av.1 | ||
| 440 |
_aHandbook Of Electronic Materials _vV. 3 |
||
| 500 | _aContents. -- Pt. 1. Preparation And Properties -- Pt. 2. Applications And Devices | ||
| 650 | _aSilicon Nitride | ||
| 650 | _aSemiconductors | ||
| 650 | _aElectronics -- Materials | ||
| 964 | _gCIRC | ||
| 997 | _aA32957 s C | ||
| 999 |
_c263309 _d263309 |
||