000 00473pam a2200169a 44500
008 160408b1982 xxu||||| |||| 00| 0 eng d
082 _a621.38152
_bL333
100 _aPoate, J. M.
245 1 _aLASER ANNEALING OF SEMICONDUCTORS
260 _aNew York
_bAcademic Press
_c1982
300 _axi,564
650 _aSemiconductor Industry -- Laser Use In -- Congresses
650 _aSemiconductors
700 _aMayer, James W.
964 _gCIRC
997 _aA83855 s C
999 _c276785
_d276785