| 000 | 00429pam a2200157a 44500 | ||
|---|---|---|---|
| 008 | 160408b1981 xxu||||| |||| 00| 0 eng d | ||
| 082 |
_a621.38152 _bIm7 |
||
| 100 | _aWang, Franklin F. Y. | ||
| 245 | 1 | _aIMPURITY DOPING PROCESSES IN SILICON | |
| 260 |
_aAmsterdam _bNorth-Holland _c1981 |
||
| 300 | _aviii,643 | ||
| 440 |
_aMaterials Processing _v |
||
| 650 | _aSemiconductor Doping | ||
| 964 | _gCIRC | ||
| 997 | _aA69252 s C | ||
| 999 |
_c283105 _d283105 |
||