| 000 | 00500pam a2200193a 44500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 005 | 20231130145921.0 | ||
| 008 | 160408b1984 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a012780620 | ||
| 040 | _cIIT Kanpur | ||
| 041 | _aeng | ||
| 082 |
_a539.6 _bIo6z |
||
| 245 | 1 |
_aIon implementation _bscience and technology _cedited by J. F. Ziegler |
|
| 260 |
_aOrlando _bAcademic Press _c1984 |
||
| 300 | _axi, 635p | ||
| 650 | _aIon implantation | ||
| 700 | _aZiegler, J. F. [ed.] | ||
| 942 | _cBK | ||
| 999 |
_c296024 _d296024 |
||