000			00525pam a2200181a 44500
008			160408b1984 xxu||||| |||| 00| 0 eng d
082			_a621.3817 _bD847
100			_aPowell, Ronald A.
245	1		_aDRY ETCHING FOR MICROELECTRONICS
260			_aAmsterdam _bNorth-Holland _c1984
300			_axi,299
440			_aMaterials Processing Theory And Practices _vV. 4
500			_aBibliography : P. 223-294
650			_aSemiconductors -- Etching
650			_aMicroelectronics
964			_gCIRC
997			_aA85124 s C
999			_c305875 _d305875