000 00519pam a2200169a 44500
008 160408b1979 xxu||||| |||| 00| 0 eng d
082 _a660.044
_bP695
100 _aBenenson, David M.
245 1 _aPLASMA CHEMICAL PROCESSING
260 _aNew York
_bAmerican Institute Of Chemical Engineers
_c1979
300 _a92
440 _aAiche Symposium Series
_vNo. 186, V. 75
650 _aPlasma Chemistry -- Industrial Applications -- Congresses
700 _aPfender, Emile
964 _gCIRC
997 _aA60791 C
999 _c306254
_d306254