000 00413pam a2200169a 44500
008 160408b1990 xxu||||| |||| 00| 0 eng d
020 _a0444860274
082 _a621.55
_bR742v3
100 _aRoth, A.
245 1 _aVACUUM TECHNOLOGY
250 _a3rd update&enl.
260 _aAmsterdam
_bNorth-Holland
_c1990
300 _axx,554
650 _aVacuum Technology
964 _gCIRC
997 _aA109160 C
999 _c313340
_d313340