000 00456pam a2200169a 44500
008 160408b1988 xxu||||| |||| 00| 0 eng d
020 _a877625387
082 _a541.0424
_bB633f
100 _aBoenig, Herman V.
245 1 _aFUNDAMENTALS OF PLASMA CHEMISTRY AND TECHNOLOGY
260 _aLancaster
_bTechnomic
_c1988
300 _axvii,417
650 _aPlasma Chemistry
650 _aPlasma (Ionised Gases)
964 _gCIRC
997 _aA104617 C
999 _c314494
_d314494