| 000 | 00573pam a2200193a 44500 | ||
|---|---|---|---|
| 008 | 160408bc1996 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0125330227 | ||
| 082 |
_a530.4175 _bM72R |
||
| 100 | _aStephen Rossnagel | ||
| 245 | 1 | _aMODELLING OF FILM DEPOSITION FOR MICROELECTRONIC APPLICATIONS | |
| 260 |
_a _bAcademic Press, San Diego _cc1996 |
||
| 300 | _axiv,291 | ||
| 440 |
_aThin Films _vV.22 |
||
| 500 | _aIncludes Bibliographical References And Index | ||
| 650 | _aSurfaces (Technology) | ||
| 700 | _aRossnagel,Stephen | ||
| 964 | _gCIRC | ||
| 997 | _aA122746 C | ||
| 999 |
_c326895 _d326895 |
||