| 000 | 00578pam a2200181a 44500 | ||
|---|---|---|---|
| 008 | 160408b1998 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0824799518 | ||
| 082 |
_a621.38152 _bN733M |
||
| 100 | _aNonogaki,Saburo, Ueno,Takumi | ||
| 245 | 1 | _aMICROLITHOGRAPHY FUNDAMENTALS IN SEMICONDUCTOR DEVICES AND FABRICATION TECHNOLOGY | |
| 260 |
_a _bMarcel Dekker, New York _c1998 |
||
| 300 | _aiv,327 | ||
| 650 | _aSemiconductors -- Design And Construction | ||
| 650 | _aMicrolithography -- Industrial Application | ||
| 700 | _aIto,Toshio | ||
| 964 | _gCIRC | ||
| 997 | _aA126689 C | ||
| 999 |
_c331067 _d331067 |
||