| 000 | 00670pam a2200193a 44500 | ||
|---|---|---|---|
| 008 | 160408bc2000 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0824787838 | ||
| 082 |
_a621.38152 _bH192N |
||
| 100 | _aYoshio No Nishi,Robert No Doering,Tim No Wooldrige | ||
| 245 | 1 | _aHANDBOOK OF SEMICONDUCTOR MANUFACTURING TECHNOLOGY | |
| 260 |
_a _bMarcel Dekker,New York _cc2000 |
||
| 300 | _axiv,1157 | ||
| 500 | _aIncludes Bibliographical References And Index | ||
| 650 | _aSemiconductors -- Design And Construction -- Handbooks, Manuals Etc | ||
| 650 | _aSemiconductor Industry -- Handbooks, Manuals Etc | ||
| 700 | _aWooldrige,Tim | ||
| 964 | _gCIRC | ||
| 997 | _aA135919 s C | ||
| 999 |
_c338083 _d338083 |
||