000 00670pam a2200193a 44500
008 160408bc2000 xxu||||| |||| 00| 0 eng d
020 _a0824787838
082 _a621.38152
_bH192N
100 _aYoshio No Nishi,Robert No Doering,Tim No Wooldrige
245 1 _aHANDBOOK OF SEMICONDUCTOR MANUFACTURING TECHNOLOGY
260 _a
_bMarcel Dekker,New York
_cc2000
300 _axiv,1157
500 _aIncludes Bibliographical References And Index
650 _aSemiconductors -- Design And Construction -- Handbooks, Manuals Etc
650 _aSemiconductor Industry -- Handbooks, Manuals Etc
700 _aWooldrige,Tim
964 _gCIRC
997 _aA135919 s C
999 _c338083
_d338083