000 | 00477pam a2200193a 44500 | ||
---|---|---|---|
003 | OSt | ||
008 | 160408b2001 xxu||||| |||| 00| 0 eng d | ||
020 | _a047132244X | ||
040 | _cIIT Kanpur | ||
041 | _aeng | ||
082 |
_a621.381 _bV139 |
||
245 | 1 |
_aVACUUM MICROELECTRONICS _cedited by Wei Zhu |
|
260 |
_bJohn Wiley _c2001 _aNew York |
||
300 | _axiii, 396p | ||
650 | _aMicroelectronics | ||
650 | _aVacuum Technology | ||
700 | _aZhu, Wei [Ed.] | ||
942 | _cBK | ||
999 |
_c338085 _d338085 |