| 000 | 00477pam a2200193a 44500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 008 | 160408b2001 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a047132244X | ||
| 040 | _cIIT Kanpur | ||
| 041 | _aeng | ||
| 082 |
_a621.381 _bV139 |
||
| 245 | 1 |
_aVACUUM MICROELECTRONICS _cedited by Wei Zhu |
|
| 260 |
_bJohn Wiley _c2001 _aNew York |
||
| 300 | _axiii, 396p | ||
| 650 | _aMicroelectronics | ||
| 650 | _aVacuum Technology | ||
| 700 | _aZhu, Wei [Ed.] | ||
| 942 | _cBK | ||
| 999 |
_c338085 _d338085 |
||