000 00477pam a2200193a 44500
003 OSt
008 160408b2001 xxu||||| |||| 00| 0 eng d
020 _a047132244X
040 _cIIT Kanpur
041 _aeng
082 _a621.381
_bV139
245 1 _aVACUUM MICROELECTRONICS
_cedited by Wei Zhu
260 _bJohn Wiley
_c2001
_aNew York
300 _axiii, 396p
650 _aMicroelectronics
650 _aVacuum Technology
700 _aZhu, Wei [Ed.]
942 _cBK
999 _c338085
_d338085