| 000 | 00603pam a2200193a 44500 | ||
|---|---|---|---|
| 008 | 160408bc2002 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0471316717 | ||
| 082 |
_a660.02 _bM691H |
||
| 100 | _aMisra,Ashutosh,Hogan,Jeremiah D. | ||
| 245 | 1 | _aHANDBOOK OF CHEMICALS AND GASES FOR THE SEMICONDUCTOR INDUSTRY | |
| 260 |
_a _bJohn Wiley, New York _cc2002 |
||
| 300 | _axiii,363 | ||
| 500 | _aIncludes Index | ||
| 650 | _aChemicals -- Handbook, Manuals, Etc | ||
| 650 | _aSemiconductors -- Materials -- Handbooks, Manuals, Etc | ||
| 700 | _aChorush,Russell | ||
| 964 | _gCIRC | ||
| 997 | _aA141739 C | ||
| 999 |
_c340780 _d340780 |
||