000 00711pam a2200229a 44500
008 160408b1998 xxu||||| |||| 00| 0 eng d
020 _a354063973X
082 _a621.38152028
_bM565L2
100 _aMetev,Simeon M.
245 1 _aLASER ASSISTED MICROTECHNOLOGY
250 _a2nd updated
260 _a
_bSpringer-Verlag, Berlin
_c1998
300 _axii,270
440 _aSpringer Series In Materials Science
_v19
500 _aIncludes Bibliographical References And Index
650 _aElectronic Industries -- Technological Innovations
650 _aLasers -- Industrial Applications
650 _aManufacturing Processes
700 _aVeiko,Vadim P.
964 _gCIRC
997 _aA138678 s C
999 _c343692
_d343692