000			00711pam a2200229a 44500
008			160408b1998 xxu||||| |||| 00| 0 eng d
020			_a354063973X
082			_a621.38152028 _bM565L2
100			_aMetev,Simeon M.
245	1		_aLASER ASSISTED MICROTECHNOLOGY
250			_a2nd updated
260			_a _bSpringer-Verlag, Berlin _c1998
300			_axii,270
440			_aSpringer Series In Materials Science _v19
500			_aIncludes Bibliographical References And Index
650			_aElectronic Industries -- Technological Innovations
650			_aLasers -- Industrial Applications
650			_aManufacturing Processes
700			_aVeiko,Vadim P.
964			_gCIRC
997			_aA138678 s C
999			_c343692 _d343692