000 | 00711pam a2200229a 44500 | ||
---|---|---|---|
008 | 160408b1998 xxu||||| |||| 00| 0 eng d | ||
020 | _a354063973X | ||
082 |
_a621.38152028 _bM565L2 |
||
100 | _aMetev,Simeon M. | ||
245 | 1 | _aLASER ASSISTED MICROTECHNOLOGY | |
250 | _a2nd updated | ||
260 |
_a _bSpringer-Verlag, Berlin _c1998 |
||
300 | _axii,270 | ||
440 |
_aSpringer Series In Materials Science _v19 |
||
500 | _aIncludes Bibliographical References And Index | ||
650 | _aElectronic Industries -- Technological Innovations | ||
650 | _aLasers -- Industrial Applications | ||
650 | _aManufacturing Processes | ||
700 | _aVeiko,Vadim P. | ||
964 | _gCIRC | ||
997 | _aA138678 s C | ||
999 |
_c343692 _d343692 |