000 00529pam a2200193a 44500
008 160408b2003 xxu||||| |||| 00| 0 eng d
020 _a3527403655
082 _a621.38152
_bM565
100 _aKlaus Wetzig,M. Schneider
245 1 _aMETAL BASED THIN FILMS FOR ELECTRONICS
260 _a
_bWiley-Vch,Weinheim
_c2003
300 _ax,378
500 _aIncludes Bibliographical References And Index
650 _aThin Films
650 _aMetallic Films
700 _aSchneider,M
964 _gCIRC
997 _aA146482 C
999 _c345484
_d345484