| 000 | 00473pam a2200169a 44500 | ||
|---|---|---|---|
| 008 | 160408b2004 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a354020458 | ||
| 082 |
_a621.3 _bK127N |
||
| 100 | _aKaltenbacher,Manfred | ||
| 245 | 1 | _aNUMERICAL SIMULATION OF MECHATRONIC SENSOR AND ACTUATORS | |
| 260 |
_a _bSpringer-Verlag, Berlin _c2004 |
||
| 300 | _axv,311 | ||
| 650 | _aMicroelectromechanical Systems | ||
| 650 | _aMechatronics | ||
| 964 | _gCIRC | ||
| 997 | _aA149485 s C | ||
| 999 |
_c348099 _d348099 |
||