000 00417pam a2200169a 44500
008 160408b2005 xxu||||| |||| 00| 0 eng d
020 _a3540200568
082 _a621.3663
_bEX25
100 _aBasting,D.
245 1 _aEXCIMER LASER TECHNOLOGY
260 _a
_bSpringer-Verlag, Berlin
_c2005
300 _axix,433
650 _aExcimer Lasers
700 _aMarowsky,G.
964 _gCIRC
997 _aA153364 C
999 _c350712
_d350712