000 00573pam a2200205a 44500
008 160408b2005 xxu||||| |||| 00| 0 eng d
020 _a0471720011
082 _a530.44
_bL621P2
100 _aLieberman,Michael A.,Lichtenberg,Allan J.
245 1 _aPRINCIPLES OF PLASMA DISCHARGES AND MATERIALS PROCESSING
250 _a2nd
260 _a
_bJohn Wiley & Sons Inc., New Jersey
_c2005
300 _axxxv,757
650 _aPlasma Dynamics
650 _aThin Films -- Surfaces
650 _aPlasma Etching
964 _gCIRC
997 _aA151641 C
999 _c351758
_d351758
942 0 0 _01