| 000 | 00573pam a2200205a 44500 | ||
|---|---|---|---|
| 008 | 160408b2005 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0471720011 | ||
| 082 |
_a530.44 _bL621P2 |
||
| 100 | _aLieberman,Michael A.,Lichtenberg,Allan J. | ||
| 245 | 1 | _aPRINCIPLES OF PLASMA DISCHARGES AND MATERIALS PROCESSING | |
| 250 | _a2nd | ||
| 260 |
_a _bJohn Wiley & Sons Inc., New Jersey _c2005 |
||
| 300 | _axxxv,757 | ||
| 650 | _aPlasma Dynamics | ||
| 650 | _aThin Films -- Surfaces | ||
| 650 | _aPlasma Etching | ||
| 964 | _gCIRC | ||
| 997 | _aA151641 C | ||
| 999 |
_c351758 _d351758 |
||
| 942 | 0 | 0 | _01 |