000 00588pam a2200193a 44500
008 160408b1990 xxu||||| |||| 00| 0 eng d
020 _a0201108313
082 _a621.38173
_bR876S
100 _aRunyan,W R
245 1 _aSEMICONDUCTOR INTEGRATED CIRCUIT PROCESSING TECHNOLOGY
260 _a
_bAddison--Wesley Publishing Company, California
_c1990
300 _axviii,683
500 _aIncludes Index
650 _aIntegrated Circuits--Design And Construction
650 _aSemiconductors--Design And Construction
700 _aBean,K E
964 _gCIRC
997 _aA152477 C
999 _c352437
_d352437